III Series

intelliSCAN III 10

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Aperture
10 mm
Angle Transmitter of Galvanometer Scanners
analog
position detector
Show Optical Configuration
Wavelength range
(standard)
Standard coatings for all common laser systems:
YAG- & fiber lasers,
Green lasers,
UV lasers,
DUV lasers,
CO2 lasers

In addition, our portfolio includes numerous multiple wavelength and broadband coatings, as well as coatings for short-pulse applications and polarization-maintaining coatings
Max. laser power
(standard systems, 100% duty cycle)
200 W @ 1064 nm
Typical scan angle
±0.35 rad
Image field size
(1064 nm, f = 160 mm)
120 mm x 120 mm
(for f = 163 mm)
Typical spot size
(1064 nm, f = 160 mm, M2 = 1.0)
32 µm
Show Dynamics
Number of installed tunings
up to 3
Typical tuning
Fast vector tuning
Tracking error
0.11 ms
Marking speed
(f = 160 mm)
3.5 m/s
Positioning speed
(f = 160 mm)
12 m/s
Writing speed
(with F-Theta lens, f = 160 mm)
High writing quality
760 cps
Good writing quality
1080 cps
Step response time
(settling to 1/1000 of full scale)
1% of full scale
0.40 ms
10% of full scale
1.1 ms
Precision
Repeatability
(RMS)
< 2 µrad
Positioning resolution
(max.)*
18 bit *
Nonlinearity
< 0.9 mrad / 44°
Temperature drift
オフセット
< 15 µrad/K
Gain
< 25 ppm/K
8-h-drift
(after 30 min warm-up)
Offset
< 100 µrad
Gain
< 100 ppm
24-h-drift
(after 3 h warm-up)
Offset
< 100 µrad
Gain
< 100 ppm
* 18 bit: based on the full angle range (e.g. positioning resolution 2.8 µrad for angle range ±0.36 rad),
resolutions better than 16 bit (11 µrad) only together with SL2-100 interface
Electronics / Control
Servo control galvanometer scanner
digital servo control board
Control interface
(alternatives)
digital SL2-100,
digital XY2-100 Enhanced
Advanced diagnosis options
yes (iDRIVE)
Power requirements
30 V DC, max. 6 A
Mechanics
Scan axes
2-axis system
Housing variants
Standard: scan head
Alternative: module (without housing)
Connector positions
beam entrance side,
alternatively opposite to beam exit side
Weight without objective
(standard housing)
3 kg
Dimensions (L x W x H)
(standard housing)
(175 x 114 x 147) mm
Beam displacement
12.56 mm
Other Provisions
Water cooling
optionally
Air cooling
optionally
Other Specifications
Operating temperature
25 °C ± 10 °C
Gain error
< 5 mrad
Zero offset deviation
< 5 mrad
Add-ons
Combinable with varioSCAN for 3D applications,
control with SCANLAB´s RTC boards,
camera adapter
Typical Applications
Micromachining,
Marking, welding, drilling,
Rapid prototyping,
Rapid tooling,
Materials processing in the semiconductor industry,
Processing-on-the-fly
Compare Products
Application-Micromachining-Products

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Options

  • Objectives with optimized mounting kits

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