equipped with analog position detectors, as well as versions with digital encoders.
products include the field-proven de-Encoders and the further-enhanced se-Encoders (SCANLAB encoders).
Special care has been taken to ensure that these digital encoders enhance positioning precision without compromising
or mechanical dimensions. They offer highest dynamic performance with XY-stage precision, as well as comprehensive position feedback and diagnostics. They are particularly suitable for applications that demand the highest possible precision and throughput.
de-Encoders enable a positioning resolution of 19-20 bits, exceptionally low
(electronic noise), best
Position detectors with se-Encoders (based on interferometric sensing) ensure outstanding resolution along with lowest
SCANLAB's patented, ultra-low-inertia design makes systems equipped with these se-Encoders (e.g. intelliSCANse10) among the fastest, most accurate scan heads on the market – even starting with apertures of 10 mm and up.