Telecentric ultra precision scanning system for superior process quality

pivotSCAN details 500x750

The pivotSCAN is an innovative scanning system designed for demanding laser applications that require highest precision and flawless telecentricity across the entire scan field.

Conventional two mirror systems are efficient, but they struggle to maintain beam orthogonality across large scan fields, even when telecentric scan lenses are used despite the use of telecentric scan lenses. This limitation, known as non telecentricity, introduces angular deviations of the beam that can significantly reduce precision—particularly in volumetric applications and when processing materials with a high refractive index.

E.g. in glass processing, refraction at the glass surface can introduce significant aberrations—primarily astigmatism—which can be avoided when the beam enters the material perpendicularly. 

pivotSCAN makes new applications in micromachining, display fabrication and through glass via drilling (TGV) possible by enabling perfect telecentricity.

More precision through telecentricity – pivotSCAN sets new standards

Perfect telecentricity for consistently highest processing quality

Conventional two mirror scan systems used in combination with a telecentric objective still exhibit angular deviations, particularly at the outer regions of the scan field, which can result in an angle of incidence (AOI) of around 2°.

When a tightly focused laser beam with a high numerical aperture (NA) crosses the interface between two media with different refractive indices—such as from air (lower refractive index) into glass or polymer (higher refractive index)—at an oblique angle, it introduces a type of optical aberration known as astigmatism. This results in the los of a single focal point.

pivotSCAN is an optical system featuring three mirrors. These mirrors are arranged so that the final mirror acts as the origin of the beam deflection. In combination with a telecentric scan lens, this configuration eliminates parallax errors and angular deviations, ensuring that the beam remains perpendicular to the work surface across the entire scan field.

Thanks to the precise orthogonality of the laser beam, the focal spot remains consistently tight across the entire scan field. This stability ensures that the process delivers uniform quality at every position, without variations caused by changes in beam angle or position.

Intelligent motion control with SCANmotionControl

A smart handling of the three scanner axes is enabled through the SCANmotionControl software. It enables convenient control of pivotSCAN and ensures that the beam emerges always from the pivot point.

The SCANmotionControl software provides intelligent coordination of all three scanner axes. It offers convenient and seamless control of pivotSCAN and ensures that the laser beam consistently emerges from the designated pivot point for optimal precision.

It also increases the degrees of freedom in controlling laser processes and guarantees precise synchronization between laser parameters and the scan head’s motion trajectories.

The control software computes optimized motion paths based on predefined processing patterns and process parameters while taking the physical limitations of the scan head into account. It then determines the ideal combination of scan speed and laser power to achieve uniform energy deposition across the entire workpiece.

3D XL SCAN enables seamless integration into complex setups that combine pivotSCAN with excelliSHIFT as the z axis.