Beam Shaping Systems for Micromachining

SCANLAB collaborates with Pulsar Photonics in a development and sales partnership for higher integrated scanning solutions for micromachining. The market for USP (ultra-short pulse laser) applications continues to grow and major challenges are often based on a desired increase in productivity. This demand can be answered by parallelizing laser processes, for example with multi-beam systems, in numerous applications.

Microscan Extension (MSE)

The Microscan Extension could be called a '1-µm laser knife'. This scan objective extends a scan system to a micro-spot scan head.

The combination of scanner and MSE allows high-precision micromachining: The focus diameter is less than 4 μm, in the UV wavelength range even less than 1.5 µm. 

MultiBeamScanner (MBS)

The MultiBeamScanner enables parallel laser cutting, drilling and ablation processes. By using diffractive optical elements (DOE), the incident laser beam is split into diverse configurations of partial beams so that several laser spots can work simultaneously in one image field. In this way, several components can be processed simultaneously or complex structures can be created more quickly. By combining it with the XL SCAN, the speed of parallel processing and precision can be further increased.