III Series

SCANcube III 14

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Aperture
14 mm
Angle Transmitter of Galvanometer Scanners
analog
position detector
Show Optical Configuration
Wavelength range
(standard)
Standard coatings for all common laser systems:
YAG- & fiber lasers,
Green lasers,
UV lasers,
CO2 lasers

In addition, our portfolio includes numerous multiple wavelength and broadband coatings
Max. laser power
(standard systems, 100% duty cycle)
250 W @ 1064 nm
Typical scan angle
±0.35 rad
Image field size
(1064 nm, f = 160 mm)
95 mm x 95 mm
Typical spot size
(1064 nm, f = 160 mm, M2 = 1.0)
23 µm
Show Dynamics
Number of installed tunings
1
Typical tuning
Fast vector tuning
Tracking error
0.15 ms
Marking speed
(f = 160 mm)
2.0 m/s
Positioning speed
(f = 160 mm)
14.0 m/s
Writing speed
(with F-Theta lens, f = 160 mm)
High writing quality
500 cps
Good writing quality
740 cps
Step response time
(settling to 1/1000 of full scale)
1% of full scale
0.35 ms
10% of full scale
0.90 ms
Precision
Repeatability
(RMS)
< 2 µrad
Positioning resolution
(max.)*
16 bit *
Nonlinearity
< 0.9 mrad / 44°
Temperature drift
건너뛰기
< 25 µrad/K
Gain
< 25 ppm/K
8-h-drift
(after 30 min warm-up)
Offset
< 100 µrad
Gain
< 100 ppm
* 16 bit: based on the full angle range (e.g. positioning resolution 11 µrad for angle range ±0.36 rad)
Electronics / Control
Servo control galvanometer scanner
analog servo control board
Control interface
(alternatives)
digital SL2-100,
digital XY2-100 standard,
analog ±4,8 V
Advanced diagnosis options
no
Power requirements
±15 V DC, max. 3 A each
Mechanics
Scan axes
2-axis system
Housing variants
Standard: scan head
Connector positions
beam entrance side
Weight without objective
(standard housing)
2.3 kg
Dimensions (L x W x H)
(standard housing)
(133.5 x 99.5 x 105.5) mm
Beam displacement
16.42 mm
Other Provisions
Water cooling
no
Air cooling
no
Other Specifications
Operating temperature
25 °C ± 10 °C
Gain error
< 5 mrad
Zero offset deviation
< 5 mrad
Add-ons
Combinable with varioSCAN for 3D applications,
control with SCANLAB´s RTC boards,
camera adapter
Typical Applications
Marking applications,
Materials processing in the semiconductor industry,
Microstructuring,
Processing-on-the-fly
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Application-Micromachining-Products

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Options

  • Objectives with optimized mounting kits

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