intelliSCAN III 10
Aperture 10 mm
Angle Transmitter
of Galvanometer Scanners
analog position detector
Optical Configuration
Wavelength range
(standard)
Standard coatings for all common laser systems:
YAG- & fiber lasers,
Green lasers,
UV lasers,
DUV lasers,
CO2 lasers

In addition, our portfolio includes numerous multiple wavelength and broadband coatings, as well as coatings for short-pulse applications and polarization-maintaining coatings
Max. laser power
(standard systems, 100% duty cycle)
200 W @ 1064 nm
Typical scan angle ±0.35 rad (opt.)
Image field size
(1064 nm, f = 160 mm)
120 mm x 120 mm
(for f = 163 mm)
Fiber adapter no
Gain error < 5 mrad
Zero offset deviation < 5 mrad
Dynamic
Number of installed tunings up to 3
Typical tuning fast vector tuning
Tracking error 0.11 ms
Marking speed
(f = 160 mm)
3.5 m/s
Positioning speed
(f = 160 mm)
12 m/s
Writing speed
(with F-Theta objective, f = 160 mm)
High writing quality 760 cps
Good writing quality 1080 cps
Step response
(settling to 1/1000 of full scale)
1% of full scale 0.40 ms
10% of full scale 1.1 ms
Precision
Repeatability
(RMS)
< 2 µrad
Positioning resolution
(max.)*
18 bit *
Nonlinearity < 0.9 mrad / 44°
Temperature drift
건너뛰기 < 15 µrad/K
Gain < 25 ppm/K
8 hour drift
(after 30 min warm-up)
건너뛰기 < 100 µrad
Gain < 100 ppm
24 hour drift
(after 3 h warm-up)
건너뛰기 < 100 µrad
Gain < 100 ppm
* 18 bit: based on the full angle range (e.g. positioning resolution 2.8 µrad for angle range ±0.36 rad), <br /> resolutions better than 16 bit (11 µrad) only together with SL2-100 interface
Electrics / Control
Servo control galvanometer scanner digital servo control board
Control interface
(alternatives)
digital SL2-100,
digital XY2-100 Enhanced
Advanced diagnosis options yes (iDRIVE)
Power requirements 30 V DC, max. 6 A
Mechanics
Scan axes 2-axis system
Housing variants standard: scan head
alternative: module (without housing)
Connector positions beam entrance side,
alternatively opposite to beam exit side
Dimensions (L x W x H)
(standard housing)
(175 x 114 x 147) mm3
Weight without objective
(standard housing)
3 kg
Beam displacement 12.56 mm
Other Provisions
Water cooling optionally
Air cooling optionally
Options objectives with optimized mounting kits
Other Specifications
Dimensions (L x W x H)
(standard housing)
(175 x 114 x 147) mm3
Weight without objective
(standard housing)
3 kg
Beam displacement 12.56 mm
Operating temperature 25 °C ± 10 °C
Gain error < 5 mrad
Zero offset deviation < 5 mrad
Skew
Step response time
(settling to 1/1000 of full scale)
Typical Optical Configurations
Applications
Typical Applications Micromachining,
Marking, welding, drilling,
Rapid prototyping,
Rapid tooling,
Materials processing in the semiconductor industry,
Processing-on-the-fly