|
|||
| intelliSCAN III 10 | |||
| Aperture | 10 mm | ||
|
Angle Transmitter of Galvanometer Scanners |
analog position detector | ||
| Optical Configuration | |||
|
Wavelength range (standard) |
Standard coatings for all common laser systems: YAG- & fiber lasers, Green lasers, UV lasers, DUV lasers, CO2 lasers In addition, our portfolio includes numerous multiple wavelength and broadband coatings, as well as coatings for short-pulse applications and polarization-maintaining coatings |
||
|
Max. laser power (standard systems, 100% duty cycle) |
200 W @ 1064 nm | ||
| Typical scan angle | ±0.35 rad (opt.) | ||
|
Image field size (1064 nm, f = 160 mm) |
120 mm x 120 mm (for f = 163 mm) |
||
| Fiber adapter | no | ||
| Gain error | < 5 mrad | ||
| Zero offset deviation | < 5 mrad | ||
| Dynamic | |||
| Number of installed tunings | up to 3 | ||
| Typical tuning | fast vector tuning | ||
| Tracking error | 0.11 ms | ||
|
Marking speed (f = 160 mm) |
3.5 m/s | ||
|
Positioning speed (f = 160 mm) |
12 m/s | ||
|
Writing speed (with F-Theta objective, f = 160 mm) |
|||
| High writing quality | 760 cps | ||
| Good writing quality | 1080 cps | ||
|
Step response (settling to 1/1000 of full scale) |
|||
| 1% of full scale | 0.40 ms | ||
| 10% of full scale | 1.1 ms | ||
| Precision | |||
|
Repeatability (RMS) |
< 2 µrad | ||
|
Positioning resolution (max.)* |
18 bit * | ||
| Nonlinearity | < 0.9 mrad / 44° | ||
| Temperature drift | |||
| Offset | < 15 µrad/K | ||
| Gain | < 25 ppm/K | ||
|
8 hour drift (after 30 min warm-up) |
|||
| Offset | < 100 µrad | ||
| Gain | < 100 ppm | ||
|
24 hour drift (after 3 h warm-up) |
|||
| Offset | < 100 µrad | ||
| Gain | < 100 ppm | ||
|
* 18 bit: based on the full angle range (e.g. positioning resolution 2.8 µrad for angle range ±0.36 rad), <br /> resolutions better than 16 bit (11 µrad) only together with SL2-100 interface
|
|||
| Electrics / Control | |||
| Servo control galvanometer scanner | digital servo control board | ||
|
Control interface (alternatives) |
digital SL2-100, digital XY2-100 Enhanced |
||
| Advanced diagnosis options | yes (iDRIVE) | ||
| Power requirements | 30 V DC, max. 6 A | ||
| Mechanics | |||
| Scan axes | 2-axis system | ||
| Housing variants |
standard: scan head alternative: module (without housing) |
||
| Connector positions |
beam entrance side, alternatively opposite to beam exit side |
||
|
Dimensions (L x W x H) (standard housing) |
(175 x 114 x 147) mm3 | ||
|
Weight without objective (standard housing) |
3 kg | ||
| Beam displacement | 12.56 mm | ||
| Other Provisions | |||
| Water cooling | optionally | ||
| Air cooling | optionally | ||
| Options | objectives with optimized mounting kits | ||
| Other Specifications | |||
|
Dimensions (L x W x H) (standard housing) |
(175 x 114 x 147) mm3 | ||
|
Weight without objective (standard housing) |
3 kg | ||
| Beam displacement | 12.56 mm | ||
| Operating temperature | 25 °C ± 10 °C | ||
| Gain error | < 5 mrad | ||
| Zero offset deviation | < 5 mrad | ||
| Skew | |||
|
Step response time (settling to 1/1000 of full scale) |
|||
| Typical Optical Configurations | |||
| Applications | |||
| Typical Applications |
Micromachining, Marking, welding, drilling, Rapid prototyping, Rapid tooling, Materials processing in the semiconductor industry, Processing-on-the-fly |
||