폴리곤 스캐너 시스템
High-Speed Polygon Scanner Systems
Ultra-short-pulse (USP) lasers are advantageous for maximum-precision micro processing of diverse materials because cold ablation allows particularly fine, targeted material removal.
To achieve industrial-scale productivity, USP lasers shall be combined with ultra-fast scanners such as polygon scanner systems. Polygon scanners are ideally suited for line-oriented full-surface processing of workpieces – at fine resolutions and with freely definable patterns and structures. Thanks to their high speed, these systems can drastically reduce material processing times.
Applications range from structuring wafers, touchscreen surfaces or solar cells, to micro-drilling and processing of electronic components, glass and plastics, as well as sensor manufacturing.
Full Telecentric Optics
Combining a linear stage movement with the one-dimensional f-Theta lens enables the construction of a simple yet very capable system. The reflective f-Theta system is fully telecentric and highly linear. Telecentricity provides for a constant light-matter interaction across the scan. The impeding beam is circular, constant in size and constant in peak intensity across the scan. Due to the mirror based optics the scan grid shows no pincushion distortion and no error compensation tables are required to achieve accuracy better than 12 μm (4 sigma).
The LSE controller is the heart of the set-up. The controller is regulating the position of the laser beam and takes care of the fine time synchronization between the rotating polygon, the laser pulsing and material transport. The ‘image’ data or laser pulsing pattern is prepared in a black and white bitmap (a windows .bmp) file. The highest repetition accuracy in spot positioning is delivered through proprietary SuperSync controls.
The system controller is controlled by a set of operator defined parameters. The operator sets the laser repetition rate, the horizontal (fast direction) pulse spacing and vertical (slow direction) line spacing. It is this parameter set that controls the actual dimension of the scribed bitmap and sets the laser writing speed.
- Polygon scanner providing 100 to 400 scanned lines per second and more
- Substrate scan speeds: 25 to 100 m/s up to 400 m/s with airbearing solution
- Full telecentric mirror based f-theta optics
- Scan line length 300 mm or more by custom stitching solutions
- Supports NIR/VIS and UV wavelengths
- Diffraction limited quality optics providing small focused spot sizes
- Includes control electronics for easy integration with lasers and linear stages